Polycrystalline Silicon Piezoresistive Nano Thin Film Technology
Xiaowei Liu, Changzhi Shi and Rongyan Chuai

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Dr Changzhi Shi
Harbin Institute Of Technology
China
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Solid State
Circuits
Technologies
Jacobus W. Swart
Solid State Circuits Technologies
Edited by: Jacobus W. Swart
Publisher: INTECH
Published: January 2010
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