Micro Electronic
and Mechanical
Systems
Kenichi Takahata
Micro Electronic and Mechanical Systems
Edited by Kenichi Takahata
ISBN 978-953-307-027-8, 386 pages,  Publishing date: December 2009
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Table of Contents

01 Membrane Micro Emboss (MeME) Process for 3-D Membrane Microdevice
Masashi Ikeuchi and Koji Ikuta
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04 Non-contact Measurement of Thickness Uniformity of Chemically Etched Si Membranes by Fiber-Optic Low-Coherence Interferometry
Zoran Djinovic, Milos Tomic, Lazo Manojlovic, Zarko Lazic and Milce Smiljanic
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05 Nanomembrane: A New MEMS/NEMS Building Block
Jovan Matovic and Zoran Jakšić
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07 Specific Serum-free Conditions can Differentiate Mouse Embryonic Stem Cells into Osteochondrogenic and Myogenic Progenitors.
Hidetoshi Sakurai, Yuta Inami, Naomi Nishio, Sachiko Ito, Toru Yosikai, Haruhiko Suzuki and Ken-Ichi Isobe
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08 Micromanipulation with Haptic Interface
Shahzad Khan, Hans H. Langen and Asif Sabanovic
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09 Fabrication of High Aspect Ratio Microcoils for Electromagnetic Actuators
Daiji Noda, Masaru Setomoto and Tadashi Hattori
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11 Mechanical Properties of MEMS Materials
Zdravko Stanimirović and Ivanka Stanimirović
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12 Reliability of MEMS
Ivanka Stanimirović and Zdravko Stanimirović
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13 Numerical Simulation of Plasma-Chemical Processing Semiconductors
Yurii N. Grigoryev and Aleksey G. Gorobchuk
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14 Experimental Studies on Doped and Co-Doped ZnO Thin Films Prepared by RF Diode Sputtering
Krasimira Shtereva, Vladimir Tvarozek, Pavel Sutta, Jaroslav Kovac and Ivan Novotny
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15 Self-Aligned π-Shaped Source/Drain Ultrathin SOI MOSFETs
Yi-Chuen Eng and Jyi-Tsong Lin
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16 Accurate LDMOS Model Extraction using DC, CV and Small Signal S Parameters Measurements for Reliability Issues
Mouna Chetibi-Riah, Mohamed Masmoudi, Hichame Maanane, Jérôme Marcon, Karine Mourgues, Mohamed Ketata and Philippe Eudeline
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18 Ohmic Contacts for High Power and High Temperature Microelectronics
Lilyana Kolaklieva and Roumen Kakanakov
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19 Implications of Negative Bias Temperature Instability in Power MOS Transistors
Danijel Danković, Ivica Manić, Snežana Djorić-Veljković, Vojkan Davidović, Snežana Golubović and Ninoslav Stojadinović
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20 Radiation Hardness of Semiconductor Programmable Memories and Over-voltage Protection Components
Boris Lončar, Miloš Vujisić, Koviljka Stanković and Predrag Osmokrović
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21 ANN Application to Modelling of the D/A and A/D Interface for Mixed-mode Behavioural Simulation
Miona Andrejević Stošović and Vančo Litovski
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22 Electronic Circuits Diagnosis using Artificial Neural Networks
Miona Andrejević Stošović and Vančo Litovski
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24 Test Generation based on CLP
Giuseppe Di Guglielmo, Franco Fummi, Cristina Marconcini and and Graziano Pravadelli
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25 New Concepts of Asynchronous Circuits Worst-case Delay and Yield Estimation
Miljana Milić and Vančo Litovski
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26 Neuron Network Applied to Video Encoder
Branko Markoski, Jovan etrajčić, Jasna Mihailović, Branko Petrevski, Miroslava Petrevski, Borislav Obradović, Zoran Milošević, Zdravko Ivanković, Dobrivoje Martinov and Dušanka Tesanović
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27 Single Photon Eigen-Problem with Complex Internal Dynamics
Nenad V. Delić, Jovan P. Šetrajčić, Dragoljub Lj. Mirjanić, Zdravko Ivanković, Dobrivoje Martinov, Snežana Jokić, Ivana Petrevska–Đukić, Dušanka Tešanović and Svetlana Pelemiš
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