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Practical Application of Simulation Technique for the Resonators Using Piezoelectric Ceramics
Jeong-Ho Cho, Yong-Hyun Lee, Myung-Pyo Chun and Byung-Ik Kim

Experimental Studies on Doped and Co-Doped ZnO Thin Films Prepared by RF Diode Sputtering
Krasimira Shtereva, Vladimir Tvarozek, Pavel Sutta, Jaroslav Kovac and Ivan Novotny

Modeling and Simulation of Piezoelectric Devices
Dorina Popovici, Florin Constantinescu, Mihai Maricaru, Florea Ioan Hantila, Miruna Nitescu and Alexandru Gheorghe

Nanomembrane-Enabled MEMS Sensors: Case of Plasmonic Devices for Chemical and Biological Sensing
Zoran Jakšić and Jovan Matovic

A Review of Thermoelectric MEMS Devices for Micro-power Generation, Heating and Cooling Applications
Chris Gould and Noel Shammas

6-DOF Motion Sensor System Using Multiple Linear Accelerometers
Ryoji Onodera and Nobuharu Mimura

Modeling and Numerical Investigation of Photoacoustic Resonators
Bernd Baumann, Bernd Kost, Marcus Wolff and Hinrich Groninga

Waveguide Photodiode (WGPD) with a Thin Absorption Layer
Jeong-Woo Park

Polycrystalline Silicon Piezoresistive Nano Thin Film Technology
Xiaowei Liu, Changzhi Shi and Rongyan Chuai

Ultralow-power LSI Technology with Silicon on Thin Buried Oxide (SOTB) CMOSFET
Takashi Ishigaki, Ryuta Tsuchiya, Yusuke Morita, Nobuyuki Sugii and Shin’ichiro Kimura

Reliability of MEMS
Ivanka Stanimirović and Zdravko Stanimirović

A New Methodology for RF MEMS Simulation
Peyrou David, Coccetti Fabio, Achkar Hikmat, Pennec Fabienne, Pons Patrick and Plana Robert