Three Degrees-of-Freedom Hybrid Stage With Dual Actuators and Its Precision Motion Control
Yonmook Park

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Author’s details
Dr. Yonmook Park
Mechatronics And Manufacturing Technology Center, Samsung Electronics Co., Ltd.
Republic Of Korea
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Motion Control
Federico Casolo
Motion Control
Edited by: Federico Casolo
Publisher: INTECH
Published: January 2010
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